Nanotech 2014 Vol. 2
Nanotech 2014 Vol. 2
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics

MEMS & NEMS Devices & Applications Chapter 1

Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

Authors: V. Rochus, M. Farghaly, X. Rottenberg, H.A.C. Tilmans

Affilation: imec, Belgium

Pages: 41 - 44

Keywords: magnetometer, resonator, equivalent model, optimization

This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port network. More specifically, the optimization is performed thanks to an equivalent circuit that models the electro-magneto-mechanical behavior of the magnetometer.

ISBN: 978-1-4822-5827-1
Pages: 570
Hardcopy: $209.95