Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

NanoFab: Manufacturing & Instrumentation Chapter 6

Direct Observation of Nanofabrication using the Optical Microscope combined with Nanopipette/QTF-AFM System

Authors: S. An, C. Stambaugh, S. Kwon, K. Lee, B. Kim, Q. Kim and W. Jhe

Affilation: Seoul National University, Korea

Pages: 477 - 480

Keywords: nanopipette/QTF-AFM, nano-Patterning, liquid delivery, PDMS

We demonstrated direct observation of nanofabrication using the optical microscope (OM) combined with nanopipette/QTF-AFM (Quartz Tuning Fork-Atomic Force Microscopy) system. Various solutions are ejected onto the substrate through the nano-/micro-aperture of the pulled pipette, and the nano-/microscale objects were formed in on-demand spot of the surface with the patterning system. Lithography with various materials can be realized with any liquid solution and sample, such as nanoparticles, PDMS, nanowires by monitoring the fluid phenomena on the substrate with the home-made OM. After forming of capillary condensation between apex of the pipette tip and the surface, the electric field is applied to extract out the inside liquid to the substrate and the nano-microscale objects are fabricated. The nanoscale patterning size can be controlled by the aperture diameters of the pulled pipette.

ISBN: 978-1-4822-0584-8
Pages: 808
Hardcopy: $209.95