Goj B., Dressler L., Hoffmann M.
Ilmenau University of Technology, DE
Keywords: biaxial nanoprobe, electrostatic actuator, non-contact, silicon micromachining
In this work an oscillating biaxial nanoprobe will be presented which measures the surface of a measurement object. The biaxial nanoprobe vibrates in two directions to realize scanning measurements and to overcome the challenges of sticking. Two electrostatic actuators drive the nanoprobe in x- and y-direction and two electrostatic sensors measure the position of the probe. If the touching element of the biaxial nanoprobe is close enough to the measurement object (≤ 1 µm) the oscillations are damped because of the squeeze film damping between the measurement object and the spherical touching element. A contact model for the oscillating nanoprobe will be presented. Therewith, the influences of the measurement environment to the behaviour of the nanoprobe will be discussed.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: May 12, 2013
Pages: 197 - 200
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4822-0584-8