Authors: A. Merdassi, V.P. Chodavarapu
Affilation: McGill University, Canada
Pages: 185 - 188
Keywords: low-g accelerometers, MEMS sensors, capacitance sensing, microfabrication, SOIMUMPS
We describe integrated multi-axis low-g MEMS accelerometer devices fabricated in a commercial SOIMUMPS process available from MEMSCAP. We employ capacitive transduction mechanism which provides high reliability, low temperature sensitivity, low drift, and low power consumption. We introduce a new technique to reduce or eliminate the cross-axis sensitivity based on the design of using both decoupled frames and different mechanical springs that are sensitive for each specific axis.
Nanotech Conference Proceedings are now published in the TechConnect Briefs