Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

MEMS & NEMS Devices & Applications Chapter 3

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

Authors: A. Merdassi, V.P. Chodavarapu

Affilation: McGill University, Canada

Pages: 185 - 188

Keywords: low-g accelerometers, MEMS sensors, capacitance sensing, microfabrication, SOIMUMPS

We describe integrated multi-axis low-g MEMS accelerometer devices fabricated in a commercial SOIMUMPS process available from MEMSCAP. We employ capacitive transduction mechanism which provides high reliability, low temperature sensitivity, low drift, and low power consumption. We introduce a new technique to reduce or eliminate the cross-axis sensitivity based on the design of using both decoupled frames and different mechanical springs that are sensitive for each specific axis.

ISBN: 978-1-4822-0584-8
Pages: 808
Hardcopy: $209.95