Authors: P. Lorenz, M. Kloeppel, F. Frost, M. Ehrhardt, P. Li, K. Zimmer
Affilation: IOM Leipzig, Germany
Pages: 686 - 689
Keywords: nanostructuring, dielectric surface, KrF excimer laser
Nanostructures as well as nanoparticles have a large field of application and a growing economic importance. However, the fabrication of nanostructures poses a big challenge. One promising approach is the usage of laser methods, which exhibit an outstanding potential for a fast and flexible production of nanostructures. In particular, the IPSM-LIFE method (IPSM-LIFE: laser-induced front side etching using in situ pre-structured metal layers) allows the easy production of complex nanostructures in dielectric surfaces like ring structures and nanostructures with a lateral size down to 20 nm. The irradiation (KrF excimer laser) of a thin metal layer on a dielectric surface results in the formation of complex metal structures by self-assembly processes and in the generation of structures within the dielectric surface due to melting, restructuring, and resolidification processes. Further laser irradiation of the formed metal structures with higher laser fluences causes the formation of complex patterns in the dielectric surface. The resulting structures were studied using scanning electron and atomic force microscopy. In addition, the experimental results were compared with surface structures obtained from finite element method simulations, where the laser-solid interaction was estimated by a modified heat equation and the restructuring of the liquid film by Navier-Stokes equations.
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