Authors: K. Hayashi, F. Tanaka, T. Sugiura, T. Matsuda
Affilation: Kanazawa Institute of Technology, Japan
Pages: 535 - 538
Keywords: neutral free-radical beam, CW laser, negative ion, quantum device processing
Ion-current difference measurement by light intensity modulation ( ICD ) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.