Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

Micro & Nano Fluidics Chapter 5

Numerical modeling of squeeze-film damping in micro-mirrors including rarefaction effects

Authors: S. Nigro, L. Pagnotta, M.-F. Pantano

Affilation: Università della Calabria, Italy

Pages: 333 - 336

Keywords: squeeze-film damping, MEMS, FEM

In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure regime. Finally, we discuss our results, which show good agreement with the corresponding experimental data.

ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95