Authors: S. Nigro, L. Pagnotta, M.-F. Pantano
Affilation: Università della Calabria, Italy
Pages: 333 - 336
Keywords: squeeze-film damping, MEMS, FEM
In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure regime. Finally, we discuss our results, which show good agreement with the corresponding experimental data.