Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection

Authors: P-Y Lin, Y-J Cheng, S. Kuan, and L-S. Huang

Affilation: National Tainwan University, Taiwan

Pages: 402 - 405

Keywords: microcantilever, TFT, surface stress, sensors

Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible change in drain current confirms the feasibility of TFT-based MCLs for monitoring deflection at the sensitivity of 40 nA/μm.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95