Li H.S., Liu K.C., Hsieh W.H., Au L.K.C., Liu K.C.
National Chung Cheng University, TW
Keywords: grating, micro injection molding, nanoimprint, Sol Gel
There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this conference.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Pages: 333 - 335
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4398-7139-3