Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS Fab: Design, Manufacture, Instrumentation Chapter 5

Machining Using Fast Tool Servo Combined with Ultrasonic Vibrator

Authors: S.C. Choi, Lu Hong, D.W. Lee

Affilation: Pusan University, Korea

Pages: 296 - 299

Keywords: fast tool servo, ultrasonic vibratior, microstructure, cutting

In the diamond turning which conjunction with fast tool servo (FTS), burr formation is a key factor of the work piece surfaces roughness and diamond tool wear. This paper presents a machining method that combined the ultrasonic vibrator with the FTS device, in order to improve the precision of the work piece surface. An ultra precision machine was used to move the FTS device in the cutting direction. The single crystal diamond tool was utilized to cut the work piece. This paper experimentally investigates the effect of cutting parameters on cutting performances in the machining of brass by applying both the conventional FTS and the combination FTS method. It is observed that the combination FTS method improves the cutting patterns and reduces the formation of the burr at low cutting speed as compared to the conventional FTS method.

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95