Carbon Nano Structures & Devices Chapter 2

Fabrication of Nanoporous Ultrananocrystalline Diamond Membranes

Authors: O.V. Makarova, R. Divan, N. Moldovan, C.-M. Tang

Affilation: Creatv MicroTech, Inc, United States

Pages: 242 - 245

Keywords: nanocrystalline diamond, nanoporous membranes, e-beam lithography, RIE

Abstract:
Nanoporous membranes engineered to mimic natural filtration systems can be used in smart implantable drug delivery systems, bioartificial organs, and other novel nano-enabled medical devices. The ultrananocrystalline diamond (UNCD) porous membranes will open new opportunities in implant medicine because of the highest, unmatched by other materials degree of biocompatibility and anti-biofouling. We report our results on high porosity high-aspect-ratio UNCD membranes fabricated using e-beam lithography, reactive ion etching and laser writing.

ISBN: 978-1-4398-3401-5
Pages: 976
Hardcopy: $189.95