Nanotech 2009 Vol. 1
Nanotech 2009 Vol. 1
Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics

MEMS and NEMS Chapter 5

Advancement of Prototyping and Fabrication Techniques for Active Sensors and Microelectronics
J.L. Zunino, D.R. Skelton

The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm
W. Cui, R.N. Miles, Q. Su
State University of New York at Binghamton, US

Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization
S.-S. Je, J. Kim, M.N. Kozicki, J. Chae
Arizona State University, US

Pneumatically driven Auxiliary Micro Tools for Desktop Factories
B. Hoxhold, S. Büttgenbach
Technische Universität Braunschweig, DE

Nanocomposite Contact Material for MEMS Switches
C. Ding, N.C. MacDonald
University of California, Santa Barbara, US

Fabrication of Nanostructures on Curved Surfaces Using PDMS Stamp
B. Farshchian, S. Park
Louisiana State University, US

Deposition of beta-SiC thin films on Si (100) substrates by MOCVD method for NSOM applications
S-H Nam, M-H Kim, J-S Hyun, J-H Boo
Sungkyunkwan University, KR

Design of Multi – Dimensional Variable Capacitors for RF MEMS
V.K. Lamba, D. Engles, S.S. Malik, A. Gupta
HCTM Kaithal, IN

Dielectrophoresis and Comsol Simulation of Cell Entrapment At Electrodes
D. Padmaraj, W. Zagozdzon-Wosik, R. Pande, J.H. Miller, L-M Xie, J. Wosik
University of Houston, US

BioMEMS for Mitochondriaa Medicine
D. Padmaraj, W. Zagozdzon-Wosik, Lei-Ming Xie, D. Pijanowka, J.H. Miller, P. Grabiec, J. Wosik
University of Houston, US

Contactless Micro Position and Angular Sensor Device Based on Micro Structured Polymer Magnets
A. Waldschik, M. Feldmann, J. Dittmer, S. Büttgenbach
Technische Universität Braunschweig, DE

Micro-Fabricated Electrostatic Voltage Sensor with a Thin Bulk-Silicon Device Layer
J. Dittmer, R. Judaschke, S. Büttgenbach
Technische Universität Braunschweig, DE

The Study of Mechanical Stress in NEMS Heterostructures
X. Xu, B. Bogdan, F. Lime, L. Montes
Grenoble institute of technology, FR

Amperometric Detection of Staphylococcal Enterotoxin B in milk using Magnetic Bead-Based Immunoassay on Disposable Screen Printed Carbon Electrode Strip
S.K. Rastogi, S. Gibbon, J.R. Branen, A.L. Branen
University of Idaho, US

A Multifunctional MWCNT strain sensor: sensing and damping
X. Li, A.K. Keshri, A. Agarwal, C. Levy
Florida International University, US

Energy Conversion according to Impact loading on Piezoelectric material
J. Lee, T. Kim, B. Choi
Sogang University, KR

A Novel Virtual Button User Interface for Determining the Characteristics of an Impulse Input Based on MEMS Inertial Sensors
A. Zwart, D. Effa, P. Nieva, and S. Lancaster-Larocque
University of Waterloo, CA

Microfluidic Platforms with Micro- and Nanopore Membranes and in situ Formation of Lipid Bilayer in the Microfluidic Platform
J. Choi, N. Kim, S. Park
Louisiana State University, US

Detecting CH4 and CO Gases Using Micro-Structural Doping Compound Oxide Films on Si-Substrates
Y.F. Li, S.Y. Ma, L.B. Kish, J.-J. Ding
Northwest Normal University, US

ISBN: 978-1-4398-1782-7
Pages: 702
Hardcopy: $179.95