Suy H.M.R., Herfst R.W., Steeneken P.G., Stulemeijer J., Bielen J.A.
NXP Semiconductors Research, NL
Keywords: capacitive switch, contact, model, RF-MEMS
A method is presented in which surface topography characterization is combined with the electrical measurement of the contact mechanics under electrostatic loading. Contact characteristics such as the surface separation versus the applied pressure, and the applied pressure versus the contact area, are derived. Based on these results, a contact model is validated. In combination with a compact model of a capacitive switch, this contact model is used to predict the contact behavior of different switch designs
Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: June 1, 2008
Pages: 517 - 520
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Informatics, Modeling & Simulation
ISBN: 978-1-4200-8505-1