Peroz C., Goletto V., Foresti M., Heitz C., Le Gratiet L., Barthel E., Sondergard E.
Laboratoire mixte CNRS/Saint-Gobain, FR
Keywords: nanoimprint, Sol Gel
Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 500nm by soft thermal nanoimprint lithography.
Journal: TechConnect Briefs
Volume: 4, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Published: May 20, 2007
Pages: 450 - 452
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 1-4200-6376-6