Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3

Sensors & MEMS Chapter 3

The effect of damping for the rate of flow in the micropump

Authors: W.P. Lan and J.S. Chang

Affilation: National Taiwan University, Taiwan

Pages: 141 - 144

Keywords: solid-fluid coupling, valveless micropump, piezoelectrical

This research is about identifying the optimal working frequency for valveless pump and comparison with experiment data. The fluid-solid membrane brings about different mode change as the work frequencies change. When the micropump work at high frequency, the membrane starts generating phase lag. And when the working frequency exceed 10K Hz, the phase lag becomes obvious and the mode of fluid-solid membrane turns into the peculiar type, i.e. the first mode of fluid-solid membrane is symmetry, but the peculiar type is not.

ISBN: 1-4200-6184-4
Pages: 732
Hardcopy: $139.95