Nanotech 2007 Vol. 1
Nanotech 2007 Vol. 1
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 1

Lithography and Patterning Chapter 4

Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world
K. Best, P. Raval, N. Kappel, C. Yang, M. Wang, N. Jeewakhan, M. Prejda, K. Kassekert and M. Moore
ASML USA, Inc - Special Applications, US

High resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM)
O. Wilhelmi, L Roussel, D.J. Stokes and D.H.W. Hubert
FEI Company, NL

Dip Pen Nanolithography®: A Maturing Technology for High-Throughput Flexible Nanopatterning
J.R. Haaheim, E.R. Tevaarwerk, J. Fragala and R. Shile
NanoInk, Inc., US

Fabrication of Bowtie Nano-Gap Structures by Electron Beam Lithography
R. Murali, E. Walters, F. Zaman, C. Tabor, W. Huang, M. El-Sayed and J.D. Meindl
Georgia Tech, US

Gas Phase Nanoparticle Integration
C.R. Barry and H.O. Jacobs
University of Minnesota, US

Silicon Nanowire Transistors Fabricated by the Mass-Manufacturable, Self-Assembling “Grow-in-Place” Approach
Y. Shan and S.J. Fonash
Pennsylvania State University, US

Electric Field Process for the Fabrication of Higher Order Structures form Biomolecule Derivatized Nanoparticles
M.J. Heller, D. Dehlinger, B. Sullivan and S. Esener
University of California, San Diego, US

Nanofabrication of Biomaterial, CNT and Organic Polymer Patterned Thinfilms using Piezoelectric Ink Jet Printing
J.L. Sumerel, L.F. Deravi and D.W. Wright
Dimatix, Inc., US

Direct Parallel Patterning of Multiplex DNA and protein arrays
S. Rozhok, N. Amro, J. Fragala, T. Levesque and M. Nelson
NanoInk, Inc., US

Thickness-controlled Metal Nanoscale Etch for Proposed Metal Nanowires Fabrication
B.C. Lee, M.H. Kim, H.J. Shin and S. Moon
Korea Institute of Science and Technology, KR

ISBN: 1-4200-6182-8
Pages: 726
Hardcopy: $139.95