Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS, NEMS & Sensing Chapter 3

Tuning of a MEMS RF Filter

Authors: B.K. Hammad, E.M. Abdel-Rahman and A.H. Nayfeh

Affilation: Virginia Polytechnic Institute and State University, United States

Pages: 345 - 348

Keywords: RF filter, reduced-order model, tunable filter

We present an analytical model and use it to find closed-form expressions describing the response of a tunable MEMS RF filter. The filter is made of two identical clamped-clamped micro-beams suspended over input and output electrodes, running parallel to each other, and connected by a weak micro-beam. The model accounts for general nonlinear dynamic loads and coupling of mechanical and electrical forces. It extends our earlier model to general operating conditions by allowing for a combined DC and AC input signal (V_DC-in , V_AC) and a DC voltage V_DC-out applied on the output beam. The DC components are used to magnify the RF signal, tune the filter, and reduce the insertion loss.<br>&nbsp;<br>The model allows designers to predict the achievable center frequency, tuning range, bandwidth, and insertion loss of tunable RF filters.

ISBN: 0-9767985-8-1
Pages: 913
Hardcopy: $119.95