Nanotech 2006 Vol. 1
Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1

Characterization Chapter 8

A New High Precision Procedure for AFM Probe Spring Constant Measurement using a Microfabricated Calibrated Reference Cantilever Array (CRCA)

Authors: M.G. Reitsma and R.S. Gates

Affilation: National Institute of Standards and Technology, United States

Pages: 785 - 788

Keywords: atomic force microscope, cantilever, stiffness calibration

A new technique for calibrating Atomic Force Microscope (AFM) cantilevers is demonstrated using a unique array of microfabricated reference cantilevers. The array, consisting of seven uniform rectangular cantilevers of different length (and thus stiffness), was used to perform a high precision calibration on a commercial AFM cantilever. When combined with independent validation of the reference array with an SI traceable method, the technique presented here will offer an approach for high accuracy AFM cantilever calibration.

ISBN: 0-9767985-6-5
Pages: 871
Hardcopy: $119.95