Nanotech 2006 Vol. 1
Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1

Nanoscale Modeling Chapter 7

Impacts of High-k Offset Spacer on 65-nm Node SOI Devices

Authors: M-W Ma, T-S Chao, K-S Kao, J-S Huang and T-F Lei

Affilation: National Chiao Tung University, Taiwan

Pages: 697 - 700

Keywords: high-k offset spacer, SOI, fringing electric field

In this paper, the 65-nm node SOI devices with high-k offset spacer was investigated. Calculated results show that the high-k offset spacer can effectively increase Ion and reduce Ioff due to the high vertical fringing field effect arising from the side capacitor comprising of gate/offset spacer/drain extension structure. This fringing field and, in turn, the Ion/Ioff current ratio and subthreshold swing can be strongly enhanced by increasing the dielectric constant of the offset spacer.

ISBN: 0-9767985-6-5
Pages: 871
Hardcopy: $119.95