Authors: M. Tabib-Azar, R. Wang and Y. Xie
Affilation: Case Western Reserve University, United States
Pages: 117 - 120
Keywords: nano-sensors, self-assembled scalable devices, NEMS
Self-welded multi-walled carbon nanotube (MWCNT) bridges, grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon posts, were used as tiny piezoresistors to monitor vibration and bending/deformation of silicon cantilever beams for the first time. The weld strength of CNTs measured using atomic force microscope was larger than 100 nN/CNT and their full-scale resistance change was larger than 105 .The effective longitudinal piezoresistivity of these CNTs was larger than 4x10-8 Pa-1 which is more than 10 times larger than that of 44 in silicon.