Authors: T. Klose, D. Kunze, T. Sandner, H. Schenk, H. Lakner, A. Schneider and P. Schneider
Affilation: Fraunhofer IPMS, Germany
Pages: 602 - 605
Keywords: MEMS, ANSYS, MOSCITO, optimization, torsional spring
In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the FEM tool ANSYS. For a specific spring geometry we are able to increase maximally possible deflection by approximately 30 percent.