Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS/NEMS Design and Applications Chapter 8

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors

Authors: M. Kraft and Y. Dong

Affilation: Southampton University, United Kingdom

Pages: 459 - 462

Keywords: MEMS Interface, sigma-delta modulator, closed loop, capcitive, sensor

Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper presents simulation and measurement results of different architectures applied to a bulk-micromachined accelerometer.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95