Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS/NEMS Design and Applications Chapter 8

A Novel Approach to Integrate Multiple Frequencies of Film Bulk Acoustic Resonators (FBAR) In A Single Chip
Z. Huang, Z. Suo, L.-P. Wang, D. Shim and Q. Ma
Intel Corporation, US

Biologically Functionalized Nanochannels on Ferroelectric Lead Zirconium Titanate Surfaces
L.E. Ocola, W.C. Pan, M. Kuo, V.R. Tirumala, B.D. Reiss, M.A. Firestone and O. Auciello
Argonne National Laboratory, US

Automated and Integrated Mask Genertion from a CAD Constructed 3D Model
R.L. Schiek and R.C. Schmidt
Sandia National Laboratories, US

Application of Mass Transport in Solid Electrolyte Films in Tunable Microelectromechanical Resonators
M.N. Kozicki, C.L. Brown III, M. Mitkova, S. Enderling, J. Hedley and A.J. Walton
Arizona State University, US

RF-MEMS switching LC-tank network for multiband VCO
R. Gaddi, A. Gnudi, M. Bellei, B. Margesin and F. Giacomozzi
ARCES - University of Bologna, IT

Nanoparticle Separations Using Miniaturized Field-Flow Fractionation Systems
M. Graff, T.L. Edwards, B.K. Gale and A.B. Frazier
Georgia Institute of Technology, US

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors
M. Kraft and Y. Dong
Southampton University, UK

MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities
J.L. Zunino III, D. Skelton and R. Mason
U.S. Army Corrosion Office, US

Towards Nano Mechanical Sensors
C. Hierold
ETH Zürich, CH

Intelligent Sensors: Systems or Components?
N. White
Southampton University, UK

Y-nano X-micro Technologies: nanometric optical control
D.W. de Lima Monteiro, F.P. Honorato, A.I. Ferreira Jr, O. Soloviev, G. Vdovin and M. Loktev
Federal University of Minas Gerais, BR

The Optimisation of a Resonant Gas Sensor by Using Nano-Tectured Surfaces
P.T. Docker, P.K. Kinnell and M.C.L. Ward
University of Birmingham, UK

Control of Particles Using Multi-Frequency DEP
S. Loire, Y. Zhang, F. Bottausci, I. Mezic, N. McDonald
University of California Santa Barbara, US

Zeolite Membrane Microreactors for Fine Chemical Synthesis
X. Zhang, S.M. Lai, K.F. Lam, K.L. Yeung and R. Martin-Aranda
Hong Kong University of Science and Technology, CN

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”
H.A. Rouabah, C.O. Gollasch and M. Kraft
University of Southampton, UK

Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator
A. Atre
Georgia Institute of Technology, US

MEMS-Based MHz Integrated Ultrasonic Nozzles with Applications to Micro/Nano Technologies
S.C. Tsai, Y.L. Song, Y.F. Chou, G. Qiu, E. Degiovanni, N. Wang, J.S. Cheng and C.S. Tsai
University of California, Irvine, US

The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator
C. Tsou, S.L. Huang, T.S. Lai and H.C. Li
Feng Chia University, TW

Fabrication and Characterization of MOS Transistor Tip Integrated Micro Cantilever
S.H. Lee, G. Lim and W. Moon
Pohang University of Science and Technology, KR

Computer-Based Process Design Support for MEMS
A. Wagener, J. Popp, T. Schmidt and K. Hahn
University of Siegen, DE

Packaging Design with Thermal Analysis of LED on Silicon Substrate
C. Tsou, Y.S. Huang, H.C. Li and T.S. Lai
Feng Chia University, TW

A Tunable Dispersive Optical System
K-W Shieh, J. Hsieh and H-Y Chou
Precsion Instrument Development Center, TW

Microfabricated Heteroepitaxial Oxide Structures on Silicon for Bolometric Arrays
J-H Kim and A.M. Grishin
KTH Royal Institue of Technology, SE

A Study on Alleviating Deformation of MEMS Structure and Prediction of Residual Stress in Surface Micromachining
S. Kweon, S. Hong, H. Shin and B. Jeon
Samsung Advanced Institute of Technology, KR

Design and Analysis of The CMOS Spatial Light Modulators with Flat Beam Profiles
C-P Hsu, C-T Shih, S-Y Wen, Y-H Chien, C-C Hu and H-W Lee
Industrial Technology Research Institute, TW

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95