Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

Computational Methods, Numerics and Software Tools Chapter 10

IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes

Authors: J. Juillard and E. Colinet

Affilation: SUPELEC, France

Pages: 644 - 647

Keywords: control, inverse problems, BEM, coupled-field physics

A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion of the mechanical problem in the case of a membrane of arbitrary shape, that is, how to compute the ideal pressure distribution on the membrane which corresponds to a given set of displacements.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95