Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

Nanoscale Device and Process Modeling Chapter 1

Impact of Multi-Trap Assisted Tunneling on Gate Leakage of CMOS Memory Devices

Authors: R. Entner, A. Gehring, H. Kosina, T. Grasser and S. Selberherr

Affilation: TU-Vienna, Austria

Pages: 45 - 48

Keywords: CMOS, memory, dielectric, modeling, multi-trap assisted tunneling

In this work a new approach for modeling gate leakage currents for memory cells which are highly degraded is proposed. In thicker dielectrics which are subject to high field stress and can therefore have a high defect density, not only direct tunneling currents but also trap-assisted tunneling plays an important role. By rigorous simulation we show, for the first time, that also a multi-trap assisted tunneling component becomes important for dielectric thicknesses above approximately 3 nm and even gains importance for thicker layers.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95