Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

NEMS and MEMS Fabrication Chapter 7

Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition

Authors: T.E. Hamedinger, T. Steindl, J. Albering, S. Rentenberger and R. Saf

Affilation: Graz University of Technology, Australia

Pages: 467 - 470

Keywords: vapor deposition process, thin structured films, devices

Interest in thin films of functional organic materials has increased enormously in the past years because of various possible applications. Here we report an experimental setup for the processing of various organic materials into thin structured films under atmospheric pressure conditions. The technique is based on an electrospray process. Electrostatic lenses are used to extract ions which have been generated by the drying of initially formed micro-droplets. Thin structured films are then produced by the deposition of the resulting ion beam onto a moveable target. The technique offers several interesting features, including precise film thicknesses control. Experiments investigating structured deposition are reported, this being the first step towards the production of thin films where in all three dimensions the chemical composition can be chosen at will. This approach might provide a simple strategy towards thin structured films and composites which are currently unattainable.

ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95