Authors: G-S Kang, J-S Lee, J-S Choi, Y-K Kwak and S-H Kim
Affilation: KAIST, Korea
Pages: 176 - 179
Keywords: tip, nano, stage, SEM
AFM tip has been used for surface profiling with a fine resolution, but there is a barrier to improve its performance because of the low aspect ratio. Many researchers have solved this problem with attaching carbon nanotube (CNT) to Si-tip. To attach carbon nanotube to Si-tip, it is necessary a stage system that can operate preciously. In this paper, we proposed a stage system that composed of two-stage system like Figure 1, and these stages could attach a carbon nanotube to tungsten-tip in vacuum condition. We used tungsten tip instead of Si-tip because of its conductivity. The stage system must have efficient degree-of-freedom to place carbon nanotube and tungsten-tip to the sensing area in scanning electron microscope. So, the stage system proposed in this paper has 10 degree-of-freedom that 3 in the first stage and 7 in the second stage. The stage system composed of several pico-motors and precious optical stages. Both stage has 3 linear pico-motors, that give a movement along X,Y,Z axis and the resolution is a few tens of _. And in the second stage, the system has rotating pico-motor to identify the attached condition of carbon nanotube to the tungsten-tip. At the end of the rotating pico-motor, there is a 4-quadrant piezotube. So we can get more fine 3 degree-of-freedom motion which has resolution about a _. So the first stage has a resolution about a few tens of _ and the second stage has a resolution about a _. We could place the two-stage system in vacuum chamber of scanning electron microscope like Figure 2, because its size is 170_135_65 _ that is smaller than the chamber size. With this stage system, we could make nano probe that could be used to nano tweezer.