Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Dynamic Modeling and Input Shaping for MEMS

Authors: D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis

Affilation: Rensselaer Polytechnic Institute, United States

Pages: 315 - 318

Keywords: input shaping, open loop control, vibration reduction

In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of thermally and electrostatically actuated microstructures, extending our recent results presented in [1]. Input shaping is a popular open-loop control method used primarily for vibration reduction in high precision and high speed positioning equipment [2]. This approach is particularly well suited in applications where positioning feedback signals are not available, and therefore it is very relevant for MEMS.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95