Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Smart MEMS and Sensor Systems Chapter 9

Macromodel of Intelligent Sensor Structure with Accelometer

Authors: M. Husak, J. Jakovenko, P. Kulha, J. Novak and V. Janicek

Affilation: Czech Technical University in Prague, Czech Republic

Pages: 434 - 437

Keywords: accelerometer, tiltmeter, microsystem, interface, microprocessor

The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There is described approach to the development of functional and system model of the structure. A hardware model has been developed for verification of properties. Model properties have been simulated using simulators of electronic circuits. Basic parts of the hardware model are: accelerometer, microprocessor, interface. The system is temperature-compensated. The values of referential position are set automatically.

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95