Authors: M.I. Kilani, P.G. Galambos, Y. Haik and C.J. Chen
Affilation: Florida State University, United States
Pages: 210 - 213
Keywords: pump, spiral
This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump.
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