Authors: J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate
Affilation: Transparent Networks, United States
Pages: 300 - 303
Keywords: MEOMS, mirror, array, switch, photonic, MEMS
The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. MOEMS mirror arrays are being used at the core of all-optical cross-connects, enabling switches that are transparent to network protocols, wavelengths, and bandwidth requirements. One critical factor affecting the ability to develop larger port-count switches is the scalability of the MOEMS mirror array. As the number of mirrors in an array grows by x, the number of control lines grows by nx, where n is the number of control signals for each mirror (typically 3 or 4). Passive array technology does not scale well beyond 128-256 mirrors because the density of interconnects and bond pads becomes impractical. To address the need for scalable technology, Transparent Networks has developed a series of enabling technologies to fabricate a highly integrated MOEMS mirror array. The end result is a highly integrated MOEMS mirror array capable of scaling to 4000 or more ports that meets both performance and cost requirements for successful development in the photonic switching market (fig. 5).