Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Smart MEMS and Sensor Systems Chapter 10

Using Very Large Arrays of Intelligent Sensors
R.M. Newman
Coventry University, UK

The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications
E. Hailu, A.R. Atwell, J.S. Duster, C. Li, M. Balseanu and K.T. Kornegay
Cornell University, US

Microsystem Modeling - from Macromodels to Microsystem Design
M. Husak
University of Prague, CZ

Microsensors, Arrays and Automatic Diagnosis of Sensor Faults
E. Gaura and R.M. Newman
Coventry University, UK

ISBN: 0-9728422-0-9
Pages: 560