Authors: M. Kamon, A-M. Nguyen, J.R. Gilbert
Affilation: Microcosm Technologies, Inc., United States
Pages: 313 - 317
Keywords: magnetic sensor, integral equation, simulation, eddy currents
This paper describes using 3D integral equation based simulation in combination with simulation managment to provide a design tool for an eddy-current inductive position and speed sensor under development at CSEM Microsystems. Both the frequency dependence and the position dependence of the inductance is explored to understand the operation and sensitivity of the sensor. The frequency dependence of the inductance can be captured in a low order model which can be used for higher level system simulation.
Nanotech Conference Proceedings are now published in the TechConnect Briefs