MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithims Chapter 8

A Design Tool for Inductive Position and Speed Sensors via a Fast Integral Equation Based Method

Authors: M. Kamon, A-M. Nguyen, J.R. Gilbert

Affilation: Microcosm Technologies, Inc., United States

Pages: 313 - 317

Keywords: magnetic sensor, integral equation, simulation, eddy currents

This paper describes using 3D integral equation based simulation in combination with simulation managment to provide a design tool for an eddy-current inductive position and speed sensor under development at CSEM Microsystems. Both the frequency dependence and the position dependence of the inductance is explored to understand the operation and sensitivity of the sensor. The frequency dependence of the inductance can be captured in a low order model which can be used for higher level system simulation.

ISBN: 0-9666135-4-6
Pages: 697