Authors: N.M. Wilson, P.M. Pinsky and R.W. Dutton
Affilation: Stanford University, United States
Pages: 305 - 308
Keywords: unstructured meshes, micro-electro-mechanical systems (MEMS), tetrahedral elements, finite element analysis
Simulation of micro-electro-mechanical systems (MEMS) typically involves the requirement to mesh complex 3-D representations of the geometry. Since proper manual or semi-automated mesh generation requires significant user time and knowledge, there is great interest in automating this tedious and error prone process. There are two key technical issues. First, a software package must be capable of automatically generating a mesh. Secondly, the solver must be able to ìadjustî the mesh according to the error in the solution to achieve a result which is useful to the designer. This paper starts with a survey of the current state-of-the-art in meshing software, and then it discusses the connection between element choice, mesh quality, and the accuracy of the simulation results.
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