Modeling of Piezoelectric MEMS Using the Finite Cloud Method

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In this paper we present a meshless based Finite Cloud Method (FCM) for the numerical solution of partial differential equations (PDEs) governing piezoelectricity. Using a point distribution, FCM constructs interpolation functions without assuming any connectivity between the points. A collocation approach is employed to obtain a solution at every point within the domain. The coupled mechanical and electrical equations of a piezoelectric material are solved by an iterative FCM. This approach has been verified on two static two-dimensional piezoelectric problems with exact analytical solutions

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 293 - 296
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6