MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 7

Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds

Authors: C. Rembe, E.P. Hofer and B. Tibken

Affilation: University of Ulm, Germany

Pages: 276 - 279

Keywords: microactuator, model identification, guaranteed parameter estimation, high speed visualization, dynamics

Model based evaluation of high speed cinematographic image sequences is demonstrated for a microrelay which was manufactured using the LIGA technology. The measurements of the microrelay have been performed with an experimental setup based on the stroboscopic principle and the complete identification of the dynamic model of the microrelay using cinematographic position data is carried out. The procedure described in this paper combines visualization technique and model identification methods as an important step in reengineering to improve the dynamic behavior of microactuators.

ISBN: 0-9666135-4-6
Pages: 697