MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 7

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Authors: M. Gyimesi and D. Ostergaard

Affilation: ANSYS, Inc., United States

Pages: 270 - 273

Keywords: micro electro-mechanical system MEMS, finite element analysis FEA, transducer, capacitor, strongly coupled simulation

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

ISBN: 0-9666135-4-6
Pages: 697