Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Gyimesi M., Ostergaard D.
ANSYS, Inc., US

Keywords: capacitor, finite element analysis FEA, micro electro-mechanical system MEMS, strongly coupled simulation, transducer

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 270 - 273
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6