MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 7

Analytical Modeling of Beam Behavior Under Different Actuations

Authors: E. Sarraute and I. Dufour

Affilation: URA CNRS 1375, France

Pages: 266 - 269

Keywords: modeling, beam, electrostatic, magnetic, piezoelectric

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the study of the physical phenomena. Although the results presented are obtained by making certain approximations, this study provides order of magnitude results for the deflection, and most importantly quantifies the influence of each parameter (current, voltage, thickness, length, etc.).

ISBN: 0-9666135-4-6
Pages: 697

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