Oms-Elisabelar F., Bergaud C., Nicu L., Martinez A.
CNRS, FR
Keywords: equivalent circuit, global simulation, MEMS, piezoelectric actuator
In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is develped starting grom electromechanical transduction principles and included in a commercial SPICE package. ANalytical and simulated results are compared and found in good agreement both for static and dynamic analysis.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 249 - 253
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6