MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing

Authors: T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu

Affilation: Sony Corporation, Japan

Pages: 202 - 205

Keywords: process simulation, data conversion, expert system

We have developed a system called SPDC, which is designed to automatically generate input data for simulation from process ow data for manufacturing. As this conversion is not one-to-one translation, SPDC prepares databased knowledge called "scenario" from both device and simulation expert engineers. This database is utilized to analyze process ow data for manufacturing and then to synthesize input data for simulation. SPDC enabled device engineers unfamiliar to simulation utilization to prepare input data reducing more than three days work to less than a few minutes work. The quality of the synthesized input data is perfectly comparable to the one written by expert simulation users.

ISBN: 0-9666135-4-6
Pages: 697