Authors: M. Varghese, V.L. Rabinovich and S.D. Senturia
Affilation: Massachusetts Institute of Technology, United States
Pages: 155 - 158
Keywords: macro-model, energy method, MEMS, Lorentz force, magnetics
We present a method for generating dynamic reduced-order models for Lorentz force actuation in microelectromechanical systems (MEMS). These models, derived from a set of meshed simulations, are analytical representations of the magnetic co-energy of a system. The representations are expressed as functions of harmonic mode amplitudes. By calculating analytical gradients of the co-energy with respect to the mode amplitudes, we find the Lorentz forces. Magnetic and mechanical energy domains are then coupled together by inserting Lorentz forces and mechanical forces into modal equations of motion.
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