MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

Parameter Extraction for a Microwave Micromachined Switch

Authors: J. Chen, K.M. Coperich, S-M Kang and J. Schutt-Aine

Affilation: University of Illinois at Urbana-Champaign, United States

Pages: 190 - 193

Keywords: micromechanical switch, transient simulation, S-parameter, modeling

This paper details new parameter extraction methods for microwave micromachined switches. Speciffically new methods for extracting switch turn-on and turn-off transient behavior and switch electromagnetic behavior are discussed. The accuracy of these methods are verified by comparison between simulation results and experimental measurements.

ISBN: 0-9666135-4-6
Pages: 697