MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting

Authors: S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and Ph. Renaud

Affilation: University of Michigan, United States

Pages: 184 - 189

Keywords: MEMS, I-optimality, I-OPT, silicon flow sensor, design of experiments

We present a new and unique software program, IMSET, capable of finding optimal designs for computer experiments. A finite-element simulation of a micro-machined flow sensor was used to illustrate macromodel generation and to compare the quality of the IMSET design with other approaches. Coupled with an appropriate analysis, IMSET provides a highly efficient means of non-parametric macromodel generation. IMSET is available on the World-Wide Web.

ISBN: 0-9666135-4-6
Pages: 697