MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling Chapter 5

Modeling of Electrostatic MEMS Components
G. Lorenz, R. Neul and S. Dickmann
Robert Bosch GmbH, DE

A Common Basis for Mixed-Technology Micro-System Modeling
J.P. Hanna and R.G. Hillman
Air Force Research Laboratory, US

MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis
E. Sacks and J. Allen
Purdue University, US

Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS
A. Dewey, H. Dussault, J.P. Hanna, E. Christen, G.K. Fedder, B.F. Romanowicz and M.A. Maher
Duke University, US

MEMS Component Extraction
B. Baidya, S.K. Gupta and T. Mukherjee
Carnegie Mellon University, US

ISBN: 0-9666135-4-6
Pages: 697