Authors: H. Li and E.K. Antonsson
Affilation: California Institute of Technology, United States
Pages: 113 - 116
Keywords: MEMS, design, synthesis, genetic algorithm, bulk wet etching
An automatic method for synthesizing MEMS mask-lay-outs is presented. This method uses evolutionary algorithm techniques to optimize the mask-layouts for a forward simu-lation of fabrication. Initially, a random population of mask-layouts is generated. The fabrication of each layout is sim-ulated through a digital process simulator to produce a 3D fabricated shape, which is compared to a user-specified desired shape. Each evolutionary loop governs the stochastic searching behavior such that the mask-layouts whose simu-lated shapes are closer to the desired shape are more likely to survive. More importantly, the ìbetterî masks are more likely to be evolved among those survived mask-layouts for the next loop. Through such evolutionary iterations, a near global ìoptimumî mask-layout is likely to be found. A test loop is constructed for the bulk wet etching mask synthesis by incorporating a 3D wet etching simulator. The current emerging results demonstrate the feasibility of this approach to mask-layout synthesis.
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