MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Computational Materials Chapter 3

Modeling of Oxynitride-Si System Based on Reflected Spectra

Authors: K.J. Plucinski, F. Lhomme and I.V. Kityk

Affilation: Military University of Technology, Poland

Pages: 83 - 86

Keywords: amorphous thin films, silicon oxynitride

Using ab initio molecular dynamics simulation with simultaneous quantum chemical calculations we propose a new experimental method of contact-less control of the O/N ratio in SiON films on Si<111> surfaces. The proposed method consists of direct measurements of reflected light coefficients for the parallel Rp and perpendicular Rs light polarizations in relation to the Si<111> plane. We have shown that the spectral dependence of the anisotropic ratio P=Rs/Rp is closely connected to the O/N ratio. Independently performed experimental spectra measurements correspond well with experimental data. We demonstrate significant advantages over ellipsometry, XPS and other measurements both in precision as well as in technical implementation.

ISBN: 0-9666135-4-6
Pages: 697