MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Electromagnetics, Optics, Imaging Chapter 19

CAD for Opto-Electronic Microsystems

Authors: T.P. Kurzweg, S.P. Levitan, P.J. Marchand, K.R. Prough and D.M. Chiarulli

Affilation: University of Pittsburgh, United States

Pages: 687 - 690

Keywords: MEMS-CAD, optical MEMS, MOEMS, micro-optics

The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our free-space opto-electronic system CAD tool, Chatoyant, to meet the needs of optical MEMS designers. This paper presents new analysis tech-niques which extend our tool to support optical MEM sys-tem design. We demonstrate these extensions with the analysis of a 1x2 micro-optical MEM interferometer switch.

ISBN: 0-9666135-4-6
Pages: 697