MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 17

Phenomenological Model for Gas Damping of High-Speed Switches

Authors: D.S. Greywall, J.A. Walker, P.A Busch, S.C. Arney, D.J. Bishop, G.D. Boyd, N.J. Frigo, K.W. Goossen, P.P. Iannone, R.R. Ruel and B. Yurke

Affilation: Bell Laboratories, Lucent Technologies, Inc., United States

Pages: 589 - 592

Keywords: squeeze-film damping, micromachined device, optical modulator

This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic expressions and does not rely on the Reynolds or Navier-Stokes equations. It shows, in particular, that to prevent ringing following a step change in driving force, devices intended to operate at speeds greater than a few Mbits/sec must be packaged at elevated gas pressure. Comparisons are made with experimental data.

ISBN: 0-9666135-4-6
Pages: 697