MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 17

Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs

Authors: S. Iyer, Y. Zhou and T. Mukherjee

Affilation: Carnegie Mellon University, United States

Pages: 632 - 635

Keywords: modeling, cross-axis coupling, micromechanical springs, lumped parameter modeling

Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each sprint type in order to verify the moels and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for usin in nodal simulation. Improvement in simulation time using the macromodel over beam-based simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel.

ISBN: 0-9666135-4-6
Pages: 697