MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Microfluidics Chapter 16

Non-Isothermal Gas Flow Through Rectangular Microchannels

Authors: F. Sharipov

Affilation: Universidade Federal do Parana, Brazil

Pages: 566 - 569

Keywords: microchannel, rarefied gas, Poiseuille flow, thermal creep, mass flow rate

The mass flow rate of a rarefied gas through a long rectangular channel caused by both pressure and temperature differences has been calculated applying the S model kinetic equation. The calculations have been carried out in the wide ranges of the four parameters determining the solution of the problem: the gas rarefaction, the height-to-width ratio of the channel, the pressure ratio on the channel ends and the analogous temperature ratio. First, the Poiseuille flow and the thermal creep have been calculated as a function of the local rarefaction parameter assuming the pressure and the temperature gradients to be small. Then, the total mass flow rate has been calculated for the temperature ratio equal to 3.8 and for two values of the pressure ratio: 1 and 100.

ISBN: 0-9666135-4-6
Pages: 697